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Hydride process conversions for backside SiO2 or standard SiO2, PSG, BSG, or BPSG

Lower costs compared to WJ999 with 12 inch injectors.  25% higher thru-put for 8 inch wafers; Better particle levels, film uniformity, and higher up-time

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Injectors, Vents, TOs, and More

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Upgrade to SMIF front ends

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Process Uniformity <1.0%

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